Automatic X-ray determination of solder joint and view Delta Z values from a laser mapped reference surface for circuit board inspection using X-ray laminography

ABSTRACT

An improved circuit board inspection system incorporates self learning techniques for accurate determination of Z-axis elevations of electrical connections. A Delta Z, referenced to a laser range finder generated surface map of the circuit board, is automatically determined from a series of cross sectional images of the electrical connections for each electrical connection on the circuit board. The Delta Z values for each electrical connection are stored in a data base from which customized Delta Z values for specifically defined board views may be calculated.

FIELD OF THE INVENTION

[0001] The invention relates generally to the rapid, high resolutioninspection of circuit boards using a computerized laminography system,and in particular, to systems which automatically determine the relativedistance between a solder joint elevation and a circuit board surfaceelevation using a laminographic image of the solder joint and a surfacemap of the circuit board.

BACKGROUND OF THE INVENTION

[0002] Rapid and precise quality control inspections of the solderingand assembly of electronic devices have become priority items in theelectronics manufacturing industry. The reduced size of components andsolder connections, the resulting increased density of components oncircuit boards and the advent of surface mount technology (SMT), whichplaces solder connections underneath device packages where they arehidden from view, have made rapid and precise inspections of electronicdevices and the electrical connections between devices very difficult toperform in a manufacturing environment.

[0003] Many existing inspection systems for electronic devices andconnections make use of penetrating radiation to form images whichexhibit features representative of the internal structure of the devicesand connections. These systems often utilize conventional radiographictechniques wherein the penetrating radiation comprises X-rays. MedicalX-ray pictures of various parts of the human body, e.g., the chest,arms, legs, spine, etc., are perhaps the most familiar examples ofconventional radiographic images. The images or pictures formedrepresent the X-ray shadow cast by an object being inspected when it isilluminated by a beam of X-rays. The X-ray shadow is detected andrecorded by an X-ray sensitive material such as film or other suitablemeans.

[0004] The appearance of the X-ray shadow or radiograph is determinednot only by the internal structural characteristics of the object, butalso by the direction from which the incident X-rays strike the object.Therefore, a complete interpretation and analysis of X-ray shadowimages, whether performed visually by a person or numerically by acomputer, often requires that certain assumptions be made regarding thecharacteristics of the object and its orientation with respect to theX-ray beam. For example, it is often necessary to make specificassumptions regarding the shape, internal structure, etc. of the objectand the direction of the incident X-rays upon the object. Based on theseassumptions, features of the X-ray image may be analyzed to determinethe location, size, shape, etc., of the corresponding structuralcharacteristic of the object, e.g., a defect in a solder connection,which produced the image feature. These assumptions often createambiguities which degrade the reliability of the interpretation of theimages and the decisions based upon the analysis of the X-ray shadowimages. One of the primary ambiguities resulting from the use of suchassumptions in the analysis of conventional radiographs is that smallvariations of a structural characteristic within an object, such as theshape, density and size of a defect within a solder connection, areoften masked by the overshadowing mass of the solder connection itselfas well as by neighboring solder connections, electronic devices,circuit boards and other objects. Since the overshadowing mass andneighboring objects are usually different for each solder joint, it isextremely cumbersome and often nearly impossible to make enoughassumptions to precisely determine shapes, sizes and locations of solderdefects within individual solder joints.

[0005] In an attempt to compensate for these shortcomings, some systemsincorporate the capability of viewing the object from a plurality ofangles. The additional views enable these systems to partially resolvethe ambiguities present in the X-ray shadow projection images. However,utilization of multiple viewing angles necessitates a complicatedmechanical handling system, often requiring as many as five independent,non-orthogonal axes of motion. This degree of mechanical complicationleads to increased expense, increased size and weight, longer inspectiontimes, reduced throughput, impaired positioning precision due to themechanical complications, and calibration and computer controlcomplications due to the non-orthogonality of the axes of motion.

[0006] Many of the problems associated with the conventional radiographytechniques discussed above may be alleviated by producingcross-sectional images of the object being inspected. Tomographictechniques such as laminography and computed tomography (CT) have beenused in medical applications to produce cross-sectional or body sectionsimages. In medical applications, these techniques have met withwidespread success, largely because relatively low resolution on theorder of one or two millimeters (0.04 to 0.08 inches) is satisfactoryand because speed and throughput requirements are not as severe as thecorresponding industrial requirements.

[0007] In the case of electronics inspection, and more particularly, forinspection of electrical connections such as solder joints, imageresolution on the order of several micrometers, for example, 20micrometers (0.0008 inches) is preferred. Furthermore, an industrialsolder joint inspection system must generate multiple images per secondin order to be practical for use on an industrial production line.Laminography systems which are capable of achieving the speed andaccuracy requirements necessary for electronics inspection are describedin the following patents: 1) U.S. Pat. No. 4,926,452 entitled “AUTOMATEDLAMINOGRAPHY SYSTEM FOR INSPECTION OF ELECTRONICS”, issued to Baker etal.; 2) U.S. Pat. No. 5,097,492 entitled “AUTOMATED LAMINOGRAPHY SYSTEMFOR INSPECTION OF ELECTRONICS”, issued to Baker et al.; 3) U.S. Pat. No.5,081,656 entitled “AUTOMATED LAMINOGRAPHY SYSTEM FOR INSPECTION OFELECTRONICS”, issued to Baker et al.; 4) U.S. Pat. No. 5,291,535entitled “METHOD AND APPARATUS FOR DETECTING EXCESS/INSUFFICIENT SOLDERDEFECTS”, issued to Baker et al.; 5) U.S. Pat. No. 5,621,811 entitled“LEARNING METHOD AND APPARATUS FOR DETECTING AND CONTROLLING SOLDERDEFECTS”, issued to Roder et al.; 6) U.S. Pat. No. 5,561,696 “METHOD &APPARATUS FOR INSPECTING ELECTRICAL CONNECTIONS”, issued to Adams etal.; 7) U.S. Pat. No. 5,199,054 entitled “METHOD AND APPARATUS FOR HIGHRESOLUTION INSPECTION OF ELECTRONIC ITEMS”, issued to Adams et al.; 8)U.S. Pat. No. 5,259,012 entitled “LAMINOGRAPHY SYSTEM AND METHOD WITHELECTROMAGNETICALLY DIRECTED MULTIPATH RADIATION SOURCE”, issued toBaker et al.; 9) U.S. Pat. No. 5,583,904 entitled “CONTINUOUS LINEARSCAN LAMINOGRAPHY SYSTEM AND METHOD”, issued to Adams; and 10) U.S. Pat.No. 5,687,209 entitled “AUTOMATIC WARP COMPENSATION FOR LAMINOGRAPHICCIRCUIT BOARD INSPECTION”, issued to Adams. The entirety of each of theabove referenced patents is hereby incorporated herein by reference.

[0008] In a laminography system which views a fixed object and has animaging area which is smaller than the object being inspected, it may benecessary to move the object around to position different regions of theobject within the imaging area thus generating multiple laminographswhich, when pieced together form an image of the entire object. This isfrequently achieved by supporting the object on a mechanical handlingsystem, such as an X,Y,Z positioning table. The table is then moved tobring the desired regions of the object into the imaging area. Movementin the X and Y directions locates the region to be examined, whilemovement in the Z direction moves the object up and down to select theplane within the object where the cross sectional image is to be taken.

[0009] Several of the above referenced patents disclose devices andmethods for the generation of cross-sectional images of test objects ata fixed or selectable cross-sectional image focal plane. In thesesystems, an X-ray source system and an X-Ray detector system areseparated in the “Z” axis direction by a fixed distance and thecross-sectional image focal plane is located at a predetermined specificposition in the “Z” axis direction which is intermediate the positionsof the X-ray source system and the X-ray detector system along the “Z”axis. The X-Ray detector system collects data from which across-sectional image of features in the test object, located at thecross-sectional image focal plane, can be formed. All of these systemspostulate that the features desired to be imaged are located in thefixed or selectable cross-sectional image focal plane at thepredetermined specific position along the “Z” axis. Thus, in thesesystems, it is essential that the positions of the cross-sectional imagefocal plane and the plane within the object which is desired to beimaged, be configured to coincide at the same position along the “Z”axis. If this condition is not met, then the desired image of theselected feature within the test object will not be acquired. Instead, across-sectional image of a plane within the test object which is eitherabove or below the plane which includes the selected feature will beacquired.

[0010] Presently, one technique commonly used for positioning theselected feature of the test object within the cross-sectional imagefocal plane physically measures the “Z” axis position of the selectedfeature. Using this measurement, the test object is then positionedalong the “Z” axis such that the selected feature coincides with the “Z”axis position of the cross-sectional image focal plane. Any of a varietyof standard methods and instruments may be used to physically measurethe “Z” axis position of the selected feature of the test object. Thereare several types of commercially available Z-ranging systems which areused to determine the distance between a known location in “Z” and afeature on the surface, or just below the surface, of the test object.Such systems are as simple as mechanical fixturing of the test object, amechanical probe, a laser based optical triangulation system, an opticalinterferometric system, an ultrasonic system, or any other type ofmeasuration device that is suitable. Any one of these “Z” distancemeasuring systems is typically used to form a “Z-map” of the surface ofthe test object. The Z-map typically consists of an X and Y array of theZ-values of the surface of the test object. The (X,Y) locations beingpoints on a plane of the test object which is substantially parallel tothe cross-sectional image focal plane. The systems most commonly used insystems for cross-sectional image formation of features on circuitboards have been laser based triangulation range finders.

[0011] Range finders have been used in particular for cross-sectionalX-ray image systems that are used to image electronic circuit boardassemblies. Circuit board assemblies are typically very thin incomparison to the surface area in which the components are mounted. Somecircuit assemblies are made with very dimensionally stable material,such as ceramic substrates. However, the majority of circuit boardassemblies are constructed with board material that is somewhat flexibleor in some cases very flexible. This flexibility allows the board todevelop a warp in the axis perpendicular to the major surface areas.Additionally, some circuit board assemblies have variations in boardthickness. Besides electronic assemblies, there are many other objectsthat have dimensional variation on a scale that is significant whencompared to the depth of the field of the “Z” focal plane incross-sectional X-ray imaging. By measuring the surface of a warped testobject, means can then often be used to properly adjust the positionalrelationship of the test object with respect to the “Z” focal plane ofthe cross-sectional imaging system so that the desired image of thefeatures of interest within the test object can be imaged.

[0012] Specifically, one such range finder system is designed for use ina system such as that described in U.S. Pat. No. 4,926,452 to Baker, etal. Baker et al. discloses a laminography system in which an X-ray basedimaging system having a very shallow depth of field is used to examinesolid objects such as printed circuit cards. The shallow depth of fieldprovides a means for examining the integrity of a solder joint withoutinterference from the components above and below the solder joint. Thematerial above and below the solder joint is out of focus, and hence,contributes to a more or less uniform background. To provide the neededselectivity, the depth of field of the laminographic imaging system ison the order of less than approximately 2 mils. Unfortunately, surfacevariations on the printed circuit card often exceed this tolerance. Toovercome this drawback, the surface of the printed circuit card ismapped using a laser range finder. The detailed laser range finder mapis then used to position the circuit card with respect to the X-rayimaging system such that the component of interest is in focus even whenthe card is translated from one field of interest to another.

[0013] One disadvantage of most laser ranging systems is that theyrequire that the surface being mapped be free of imperfections which caninterfere with the laser beam. Two types of commercially availableranging systems are often used. Both types operate by illuminating apoint on the surface with a collimated beam of light from a laser. Inthe first type of system, the laser beam strikes the surface at rightangles to the surface and illuminates a small spot on the surface. Theilluminated spot is imaged onto an array of detectors by a lens. Thedistance from the laser to the surface determines the degree to whichthe illuminated spot is displaced from the axis of the lens. As aresult, as the distance changes, the image of the spot moves along thearray of detectors. The identity of the detector on which the projectedspot falls provides the information needed to determine the distance tothe point on the surface. In this type of system, imperfections on thesurface can interfere with the laser beam at the point of measurementresulting in substantial errors in the measurement. In moresophisticated versions of this type of system, the image of the laserspot falls on more than one detector. The detection circuitry computesthe center of the image to provide a more precise distancedetermination. Here, imperfections in the surface that distort the imageon the detector array will also cause errors even though the height ofthe imperfection is insufficient to cause a significant distance error.The second type of system assumes that the surface is flat andreflective. In this type of system, the laser beam is directed at thesurface of the circuit board at an oblique angle and reflected from thesurface onto the detector array without an imaging lens. The distance isthen measured by identifying the detector receiving the reflected lightbeam. The distance measurement relies on a knowledge of the angle ofincidence of the laser beam with respect to the surface. If the surfaceincludes an imperfection which has dimensions similar to that of thelaser beam, this assumption will not be satisfied, since the surface ofthe imperfection will determine the angle of incidence. The resultingerrors can be much larger than the height of the imperfection in thistype of system. In principle, the problems introduced by suchimperfections could be mitigated by increasing the diameter of the laserbeam. Unfortunately, the diameter of the laser beam must be kept to aminimum to provide the required accuracy in the range measurement. Laserrange finding measurements are also made using a CCD camera which viewsthe surface and an image analyzer which analyzes the image acquired bythe CCD camera.

[0014] Another disadvantage of existing Z-map systems is the possibilitythat the desired features to be measured are not in strict mechanicalrelationship to the Z-map surface of the test object. This can occur,for example, when the desired feature to be imaged is on the oppositeside from the Z-map surface, of a double-sided circuit board assemblythat has a significant variation in board thickness. To compensate forthis effect, existing cross-sectional imaging systems would have togenerate a Z-map of both sides of a test object at added time andcomplexity. There is also the possibility that the feature to be imagedin the test object is internal to the test object at a Z distance fromthe Z-map surface of the board, with significant variation in thisdistance from board to board or within the same board. Additionally,warpage of the circuit board may not be adequately measured by the Z-mapof the surface of the board.

[0015] For solder joint inspections, some of the inaccuracies inherentin laser created Z-maps of the surface of a circuit board are partiallycompensated for by measuring “Delta Z” values. Delta Z values areintended to represent the distance between the actual Z elevations ofthe solder pads and the Z elevation values determined via the laserreadings. Currently, laser surface map points are each given a Delta Zvalue through a tedious and error prone method. This involves the userattempting to manually focus on a feature which is near the lasersurface map point and determining the Z elevation of that feature. DeltaZ is then defined as the difference between the user determined Zelevation and the laser determined Z elevation for that location. Inmany cases, it may be necessary for the user to repeat this process fornumerous locations on the circuit board. There are several significantproblems with this approach, including the following. A) The manualfocus technique is subjective and error prone. B) There must besomething suitable for the user to focus on near the laser map point.Frequently there is not, so the user will migrate far from the laser mappoint to find something to focus on, yielding an inaccurate Delta Zvalue. C) The assumption is often made that the circuit board isperfectly flat within the triangles formed by the laser map points.Frequently, it is difficult to supply enough points in certain areas toaccurately model warpage of the circuit board. D) There is no way inthis method to handle consistent variations in circuit board thickness.For example, many circuit boards have certain areas which are typicallythicker than other areas of the board. E) There is no way to map thebottom of the circuit board since there is no bottom laser.

[0016] In summary, accurate inspection of a solder joint using across-sectional image(s) of the solder joint requires that the verticalposition, i.e., Z-axis location, within the solder joint at which thecross-sectional image(s) is to be acquired be accurately known. Thesurface of the circuit board on which the solder joint is located oftenprovides a convenient reference plane from which vertical positionswithin the solder joint may be determined. Presently, laser rangefinding technology is often used to create a surface map of the circuitboard. However, due to a variety of factors, several of which arediscussed above, the laser determined Z values do not permit accuratedetermination of the actual Z-axis locations of the solder joints beinginspected.

[0017] The present invention provides improvements which address theabove listed specific problems. Particularly important is that it bothremoves the tedious and error prone method of manually setting laserDelta Z values, while supplying correct Z values for each board view incases where board warpage is consistent within the surface maptriangles.

[0018] Several advantages of the present invention include: ease of use;improved accuracy of Z elevation determination; ability to handleconsistent board thickness variations in certain areas of the circuitboard; and ability to model board warpage more accurately. Additionally,since the present invention is compatible with the currently used manualtechnique, it can be used on an as needed basis. Thus, it is possible touse the old manually set Delta Z values in cases where it is not desiredto use the new method.

[0019] Accordingly, one object of the present invention is to improvethe accuracy of the Z-map systems used in the prior art, for example,laser range finding systems, with a system that automaticallycompensates for test object warpage without requiring additional systemhardware over that hardware which is required to form the X-raylaminographic cross-sectional image.

[0020] Another object and advantage of the present invention is that itprovides an improved way to produce high resolution cross sectionalimages of electrical connections.

SUMMARY OF THE INVENTION

[0021] As used throughout, the phrase “board view” refers to an image ofa particular region or area of a circuit board identified by a specificx,y coordinate of the circuit board. Since the area imaged by a typicallaminography system is smaller than a typical circuit board, each “boardview” includes only a portion of the circuit board. Thus, the circuitboard is generally moved around to different positions thereby placingdifferent regions of the circuit board within the imaging area of thesystem. A complete inspection of a circuit board includes multiple“board views”, i.e., laminographic images, which, if pieced togetherwould form an image of the entire circuit board or selected regions ofthe circuit board requiring inspection.

[0022] The present invention comprises a greatly improved computerizedlaminography system which provides more accurate determination of the Zelevations of solder joints to be inspected.

[0023] The present invention includes a technique for automaticallylearning a Delta Z value for every solder joint on a circuit boardduring initial board setup. This is done through an automatic analysisof X-ray image focus or other image quality parameter. The machinecreates multiple laminographic image slices through the approximateboard surface and determines the Z elevation of every solder jointrelative to a surface map of the board.

[0024] After each joint Delta Z is determined, a program then calculatesa Delta Z for each board view using all of the joint Delta Z valueswithin that board view. There are several ways this can be done, such asaveraging, or throwing out outliers, etc. This method is also extensibleto actually determine that within a particular board view, board warpageis such that some joints may require a different slice within the boardview.

[0025] All of the joint Delta Z values are stored before calculating aDelta Z value for the board view which includes those joints. This isadvantageous in case minor CAD changes change the locations of the boardviews. Since the Delta Z for each joint has already been measured andsaved, it is a simple matter to recalculate a new Delta Z value for thenew board view using the new board view joint lists and the stored DeltaZ values for the joints located within the new board view.

[0026] In a first aspect, the present invention is a device forinspecting electrical connections on a circuit board comprising: asource of X-rays which emits X-rays through the electrical connectionfrom a plurality of positions; an X-ray detector system positioned toreceive the X-rays produced by the source of X-rays which havepenetrated the electrical connection, the X-ray detector system furthercomprising an output which emits data signals corresponding to an X-rayimage of the electrical connection produced by the X-rays received anddetected by the X-ray detector after penetrating the electricalconnection; an image memory which combines the detector data signals toform an image database which contains information sufficient to form across-sectional image of a cutting plane of the electrical connection atan image plane; and a processor which controls the acquisition of thecross-sectional image and analyzes the cross-sectional image, the imageprocessor further comprising: a Z-axis controller for varying a Delta Zvalue, i.e., the Z-axis distance between the image plane and a referenceZ-axis position, and acquiring a plurality of Delta Z images of theelectrical connection at a plurality of the Delta Z values; an imagegradient section which calculates and stores a plurality of gradientsfor each of the plurality of Delta Z images; a variance calculatorsection which determines a variance of the plurality of gradients foreach of the plurality of Delta Z images; and a comparator which comparesthe variances of the gradients for each of the plurality of Delta Zimages. The device may further include a surface mapper for creating asurface map of the circuit board. In some configurations, the surfacemapper further comprises a laser range finder for determining referenceZ-axis values for a plurality of points on the circuit board therebycreating a laser surface map of the circuit board. The image gradientmay be approximated over a K×K pixel grid by the following relation:

G _(MR) [f(x,y)]≅/f(x−N,y−N)−f(x+M,y+M)/+/f(x+M,y−N)−f(x−N,y+M)/

[0027] where f(x,y) represents a gray value of a pixel located at x,y; Kis an integer which is greater than or equal to 2; N=(K−1)/2 roundeddown to the nearest integer; and M=K−N−1. In some configurations, thecomparator further comprises means for fitting the variances of theplurality of gradients for each of the plurality of Delta Z images witheither one of a parabolic curve or a Gaussian curve. Additionally, thecomparator may further comprise means for determining a Delta Z valuecorresponding to a maximum value of the parabolic curve or the Gaussiancurve. In some configurations, the source of X-rays comprises aplurality of X-ray sources and the X-ray detector system comprises aplurality of X-ray detectors. The processor may further comprise animage section which produces the cross-sectional image of a cuttingplane of the electrical connection from the image database.

[0028] A second aspect of the present invention is a method ofdetermining the Z-axis position of an electrical connection on a circuitboard comprising the steps of: determining a reference Z-axis position;Z_(RF); acquiring a first cross sectional image of the electricalconnection at a first Z-axis position, Z_(RF)+ÄZ₁, and a second crosssectional image of the electrical connection at a second Z-axisposition, Z_(RF)+ÄZ₂; determining a first plurality of gradients for thefirst cross sectional image and a second plurality of gradients for thesecond cross sectional image; calculating a first variance for the firstplurality of gradients corresponding to the first cross sectional imageat the first Z-axis position, Z_(RF)+ÄZ₁, and a second variance for thesecond plurality of gradients corresponding to the second crosssectional image at the second Z-axis position, Z_(RF)+ÄZ₂; and analyzingthe first and second variances and deriving therefrom the Z-axisposition of the electrical connection. In certain configurations, thereference Z-axis position is determined with a range finder which mayfurther include a laser range finder.

[0029] A third aspect of the present invention includes a method ofdetermining the Z-axis position of an electrical connection on a circuitboard comprising the steps of: determining a reference Z-axis position,Z_(RF); acquiring a first cross sectional image of the electricalconnection at a first Z-axis position, Z_(RF)+ÄZ₁, a second crosssectional image of the electrical connection at a second Z-axisposition, Z_(RF)+ÄZ₂, and a third cross sectional image of theelectrical connection at a third Z-axis position, Z_(RF)+ÄZ₃;determining a first plurality of gradients for the first cross sectionalimage, a second plurality of gradients for the second cross sectionalimage and a third plurality of gradients for the third cross sectionalimage; calculating a first variance for the first plurality of gradientscorresponding to the first cross sectional image at the first Z-axisposition, Z_(RF)+ÄZ₁, a second variance for the second plurality ofgradients corresponding to the second cross sectional image at thesecond Z-axis position, Z_(RF)+ÄZ₂, and third variance for the thirdplurality of gradients corresponding to the third cross sectional imageat the third Z-axis position, Z_(RF)+ÄZ₃; and determining a maximumvariance value derived from the first, second and third variances andselecting a corresponding Z-axis position, Z_(RF)+ÄZ_(MAX),corresponding to the maximum variance value, as the Z-axis position ofthe electrical connection. The method may further include the step ofdetermining a mathematical function which includes points whichapproximate the values of the first, second and third variances. In somecases, the mathematical function is a parabola, while in other cases themathematical function is a Gaussian. This aspect of the invention mayfurther include a surface mapper for creating a surface map of thecircuit board.

[0030] In a fourth aspect, the present invention is a device forinspecting electrical connections on a circuit board comprising: meansfor determining a reference Z-axis position, Z_(RF); means for acquiringa first cross sectional image of the electrical connection at a firstZ-axis position, Z_(RF)+ÄZ₁, second cross sectional image of theelectrical connection at a second Z-axis position, Z_(RF)+ÄZ₂, and athird cross sectional image of the electrical connection at a thirdZ-axis position, Z_(RF)+ÄZ₃; means for determining a first plurality ofgradients for the first cross sectional image, a second plurality ofgradients for the second cross sectional image and a third plurality ofgradients for the third cross sectional image; means for calculating afirst variance for the first plurality of gradients corresponding to thefirst cross sectional image at the first Z-axis position, Z_(RF)+ÄZ₁, asecond variance for the second plurality of gradients corresponding tothe second cross sectional image at the second Z-axis position,Z_(RF)+ÄZ₂, and third variance for the third plurality of gradientscorresponding to the third cross sectional image at the third Z-axisposition, Z_(RF)+ÄZ₃, and means for determining a maximum variance valuederived from the first, second and third variances and selecting acorresponding Z-axis position, Z_(RF)+ÄZ_(MAX), corresponding to themaximum variance value, as the Z-axis position of the electricalconnection. This device may further include means for determining amathematical function which includes points which approximate the valuesof the first, second and third variances wherein the Z-axis position,Z_(RF)+ÄZ_(MAX), corresponding to the maximum variance value equals aZ-axis position which corresponds to a maximum value of the mathematicalfunction. The mathematical function may be one of a parabola or aGaussian. In some configurations, the means for determining thereference Z-axis position further comprises a laser range finder.

[0031] In a fifth aspect, the invention includes a method for inspectingelectrical connections on a circuit board comprising the steps of:determining a Z-axis position for substantially all of the electricalconnections on the circuit board; storing the Z-axis positions forsubstantially all of the electrical connections on the circuit board ina data base; selecting a first board view which includes a first portionof the circuit board; and deriving from the stored values of the Z-axispositions for the electrical connections included within the first boardview, a Z-axis position for the first board view. The method may furtherinclude the step of creating a surface map of the circuit board with arange finder. In some configurations, the method further includes thesteps of: selecting a second board view which includes a second portionof the circuit board; and deriving from the stored values of the Z-axispositions for the electrical connections included within the secondboard view, a Z-axis position for the second board view.

[0032] In a sixth aspect, the invention is a method for determining theZ-axis position of an electrical connection on a circuit boardcomprising the steps of: acquiring two or more cross sectional images,at two or more Z-axis positions, of an area of the circuit board whichincludes the electrical connection; and comparing and analyzing the twoor more cross sectional images at the two or more Z-axis positions, andderiving therefrom the Z-axis position of the electrical connection.This method may further include the step of determining a referenceZ-axis position, Z_(RF). In some configurations, the method furthercomprises the steps of: acquiring a first cross sectional image of theelectrical connection at a first Z-axis position, Z_(RF)+ÄZ₁, and asecond cross sectional image of the electrical connection at a secondZ-axis position, Z_(RF)+ÄZ₂; determining a first plurality of gradientsfor the first cross sectional image and a second plurality of gradientsfor the second cross sectional image; calculating a first variance forthe first plurality of gradients corresponding to the first crosssectional image at the first Z-axis position, Z_(RF)+ÄZ₁, and a secondvariance for the second plurality of gradients corresponding to thesecond cross sectional image at the second Z-axis position, Z_(RF)+ÄZ₂;and analyzing the first and second variances and deriving therefrom theZ-axis position of the electrical connection. In this method, the imagegradients may be approximated over a K×K pixel grid by the followingrelation:

G _(MR) [f(x,y)]≅/f(x−N,y−N)−f(x+M,y+M)/+/f(x+M,y−N)−f(x−N,y+M)/

[0033] where f(x,y) represents a gray value of a pixel located at x,y; Kis an integer which is greater than or equal to 2; N=(K−1)/2 roundeddown to the nearest integer; and M=K−N−1. In some configurations, thereference Z-axis position is determined with a range finder which mayinclude a laser range finder. The method may further include the stepsof: determining a Z-axis position for substantially all of theelectrical connections on the circuit board; storing the Z-axispositions for substantially all of the electrical connections on thecircuit board in a data base; selecting a first board view whichincludes a first portion of the circuit board; and deriving from thestored values of the Z-axis positions for the electrical connectionsincluded within the first board view, a Z-axis position for the firstboard view.

[0034] In a seventh aspect, the invention is a device for inspectingelectrical connections on a circuit board comprising: means foracquiring two or more cross sectional images, at two or more Z-axispositions, of an area of the circuit board which includes the electricalconnection; and means for comparing and analyzing the two or more crosssectional images at the two or more Z-axis positions, and derivingtherefrom the Z-axis position of the electrical connection. In someconfigurations, the device further comprises: means for determining areference Z-axis position, Z_(RF); means for acquiring a first crosssectional image of the electrical connection at a second Z-axisposition, Z_(RF)+ÄZ₁, a second cross sectional image of the electricalconnection at a second Z-axis position, Z_(RF)+ÄZ₂, and a third crosssectional image of the electrical connection at a third Z-axis position,Z_(RF)+ÄZ₃; means for determining a first plurality of gradients for thefirst cross sectional image, a second plurality of gradients for thesecond cross sectional image and a third plurality of gradients for thethird cross sectional image; means for calculating a first variance forthe first plurality of gradients corresponding to the first crosssectional image at the first Z-axis position, Z_(RF)+ÄZ₁, a secondvariance for the second plurality of gradients corresponding to thesecond cross-sectional image at the second Z-axis position, Z_(RF)+ÄZ₂,and third variance for the third plurality of gradients corresponding tothe third cross sectional image at the third Z-axis position,Z_(RF)+ÄZ₃; and means for determining a maximum variance value derivedfrom the first, second and third variances and selecting a correspondingZ-axis position, Z_(RF)+ÄZ_(MAX), corresponding to the maximum variancevalue, as the Z-axis position of the electrical connection. In someconfigurations, this device may further comprise a surface mapper forcreating a surface map of the circuit board.

[0035] These and other characteristics of the present invention willbecome apparent through reference to the following detailed descriptionof the preferred embodiments and accompanying drawings.

BRIEF DESCRIPTION OF THE DRAWINGS

[0036]FIG. 1 is a schematic representation of a laminography systemillustrating the principles of the technique.

[0037]FIG. 2a shows an object having an arrow, a circle and a crossembedded in the object at three different planar locations.

[0038]FIG. 2b shows a laminograph of the object in FIG. 2a focused onthe plane containing the arrow.

[0039]FIG. 2c shows a laminograph of the object in FIG. 2a focused onthe plane containing the circle.

[0040]FIG. 2d shows a laminograph of the object in FIG. 2a focused onthe plane containing the cross.

[0041]FIG. 2e shows a conventional, two-dimensional X-ray projectionimage of the object in FIG. 2a.

[0042]FIG. 3a is a diagrammatic cross-sectional view of a circuit boardinspection laminography system showing how the laminographic image isformed and viewed by a camera.

[0043]FIG. 3b shows a top view enlargement of an inspection region shownin FIG. 3a.

[0044]FIG. 3c is a perspective view of the circuit board inspectionlaminography system shown in FIG. 3a.

[0045]FIGS. 4a, 4 b and 4 c illustrate triangular mesh laser surfacemaps of circuit boards.

[0046]FIG. 5 shows an enlarged cross sectional view of section A-A ofthe circuit board 310 shown in FIG. 4a and illustrates how the Delta Zvalues are defined with respect to the solder pads and a Z-axisreference plane.

[0047]FIG. 6 shows an enlargement of the solder pad 320 a in FIG. 5.

[0048]FIG. 7a illustrates the procedure for computing thetwo-dimensional, discrete Robert's gradient of an image.

[0049]FIG. 7b illustrates the procedure for computing thetwo-dimensional, discrete modified Robert's gradient of an image.

[0050]FIG. 8 shows a flowchart which summarizes the procedure forautomatically determining a Delta Z value for each solder pad on acircuit board.

[0051]FIG. 9 shows a plot 500 of the variances of the gradients, 504A,504B, 504C, 504D and 504E, of multiple cross sectional images as afunction of the Z-axis locations, ÄZ_(A), ÄZ_(B), ÄZ_(C), ÄZ_(D) andÄZ_(E), of the image plane corresponding to each image.

[0052]FIG. 10 is a perspective exploded view depicting the manner inwhich a BGA device is electrically connected to the contact pads on acircuit board forming a Ball Grid Array (BGA).

[0053]FIG. 11 is an enlarged cross-sectional view showing a side sliceof a typical BGA solder connection.

[0054]FIG. 12 is a perspective view of the circuit board showing boardviews used for inspecting solder connections on the circuit board.

REFERENCE NUMERALS IN DRAWINGS

[0055]10 object under inspection

[0056]20 source of X-rays

[0057]30 X-ray detector

[0058]40 common axis of rotation

[0059]50 central ray

[0060]60 image plane in object

[0061]60 1 arrow image plane

[0062]60 b circle image plane

[0063]60 c cross image plane

[0064]62 plane of source of X-rays

[0065]64 plane of X-ray detector

[0066]70 point of intersection

[0067]81 arrow test pattern

[0068]82 circle test pattern

[0069]83 cross test pattern

[0070]100 image of arrow 81

[0071]102 blurred region

[0072]110 image of circle 82

[0073]112 blurred region

[0074]120 image of cross 83

[0075]122 blurred region

[0076]130 image of arrow 81

[0077]132 image of circle 82

[0078]134 image of cross 83

[0079]200 X-ray tube

[0080]210 printed circuit board

[0081]212 electronic components

[0082]214 electrical connections

[0083]220 support fixture

[0084]230 positioning table

[0085]240 rotating X-ray detector

[0086]250 fluorescent screen

[0087]252 first mirror

[0088]254 second mirror

[0089]256 turntable

[0090]258 camera

[0091]260 feedback system

[0092]262 input connection

[0093]263 sensor

[0094]264 output connection

[0095]265 position encoder

[0096]270 computer

[0097]276 input line

[0098]278 output line

[0099]280 rotating source spot

[0100]281 deflection coils

[0101]282 X-rays

[0102]283 region of circuit board

[0103]284 X-rays

[0104]285 rotating electron beam

[0105]286 light

[0106]287 target anode

[0107]290 granite support table

[0108]292 load/unload port

[0109]294 operator station

[0110]296 laser range finder

[0111]300 laser surface map points

[0112]302 board view center

[0113]304 surface map triangles

[0114]310 printed circuit board

[0115]312 electronic components

[0116]314 connections/solder joints

[0117]316 Z-axis reference plane

[0118]317 Z-axis reference plane

[0119]318 triangular mesh

[0120]320 solder pads

[0121]324′ circuit board surfaces

[0122]340 cross sectional image planes

[0123]400 flowchart

[0124]404-432 flowchart activity blocks

[0125]500 plot of variances

[0126]504 variance data points

[0127]508 parabolic curve

[0128]512 parabola peak

[0129]610 circuit board

[0130]612 BGA device

[0131]614 solder balls

[0132]616 device contact pads

[0133]620 circuit board contact pads

[0134]640 cross sectional image planes

[0135]710 circuit board

[0136]712 electronic components

[0137]714 electrical connections

[0138]730 board views

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

[0139] As used throughout, the term “radiation” refers toelectromagnetic radiation, including but not limited to the X-ray, gammaand ultraviolet portions of the electromagnetic radiation spectrum.

CROSS-SECTIONAL IMAGE FORMATION

[0140]FIG. 1 shows a schematic representation of a typical laminographicgeometry used with the present invention. An object 10 underexamination, for example, a circuit board, is held in a stationaryposition with respect to a source of X-rays 20 and an X-ray detector 30.Synchronous rotation of the X-ray source 20 and detector 30 about acommon axis 40 causes an X-ray image of the plane 60 within the object10 to be formed on the detector 30. The image plane 60 is substantiallyparallel to the planes 62 and 64 defined by the rotation of the source20 and detector 30, respectively. The image plane 60 is located at theintersection 70 of a central ray 50 from the X-ray source 20 and thecommon axis of rotation 40. This point of intersection 70 acts as afulcrum for the central ray 50, thus causing an in-focus cross-sectionalX-ray image of the object 10 at the plane 60 to be formed on detector 30as the source and detector synchronously rotate about the intersectionpoint 70. Structure within the object 10 which lies outside of plane 60forms a blurred X-ray image on detector 30.

[0141] In the laminographic geometry shown in FIG. 1, the axis ofrotation of the radiation source 20 and the axis of rotation of thedetector 30 are coaxial. However, it is not necessary that these axes ofrotation of the radiation source 20 and the detector 30 be coaxial. Theconditions of laminography are satisfied and a cross-sectional image ofthe layer 60 will be produced as long as the planes of rotation 62 and64 are mutually parallel, and the axes of rotation of the source and thedetector are mutually parallel and fixed in relationship to each other.Coaxial alignment reduces the number of constraints upon the mechanicalalignment of the apparatus.

[0142]FIGS. 2a-2 e show laminographs produced by the above describedlaminographic technique. The object 10 shown in FIG. 2a has testpatterns in the shape of an arrow 81, a circle 82 and cross 83 embeddedwithin the object 10 in three different planes 60 a, 60 b and 60 c,respectively.

[0143]FIG. 2b shows a typical laminograph of object 10 formed ondetector 30 when the point of intersection 70 lies in plane 60 a of FIG.2a. The image 100 of arrow 81 is in sharp focus, while the images ofother features within the object 10, such as the circle 82 and cross 83form a blurred region 102 which does not greatly obscure the arrow image100.

[0144] Similarly, when the point of intersection 70 lies in plane 60 b,the image 110 of the circle 82 is in sharp focus as seen in FIG. 2c. Thearrow 81 and cross 83 form a blurred region 112.

[0145]FIG. 2d shows a sharp image 120 formed of the cross 83 when thepoint of intersection 70 lies in plane 60 c. The arrow 81 and circle 82form blurred region 122.

[0146] For comparison, FIG. 2e shows an X-ray shadow image of object 10formed by conventional projection radiography techniques. This techniqueproduces sharp images 130, 132 and 134 of the arrow 81, circle 82 andcross 83, respectively, which overlap one another. FIG. 2e vividlyillustrates how multiple characteristics contained within the object 10may create multiple overshadowing features in the X-ray image whichobscure individual features of the image.

[0147]FIG. 3a illustrates a schematic diagram of a typical laminographicapparatus used with the present invention. In this configuration, anobject under inspection is a printed circuit board 210 having multipleelectronic components 212 mounted on the board 210 and electricallyinterconnected via electrical connections 214 (see FIG. 3b). Typically,the electrical connections 214 are formed of solder. However, variousother techniques for making the electrical connections 214 are well knowin the art and even though the invention will be described in terms ofsolder joints, it will be understood that other types of electricalconnections 214 including, but not limited to, conductive epoxy,mechanical, tungsten and eutectic bonds may be inspected utilizing theinvention. FIG. 3b, which is a top view enlargement of a region 283 ofthe circuit board 210, more clearly shows the components 212 and solderjoints 214.

[0148] The laminographic apparatus acquires cross-sectional images ofthe solder joints 214 using the previously described laminographicmethod or other methods capable of producing equivalent cross-sectionalimages. The cross-sectional images of the solder joints 214 areautomatically evaluated to determine their quality. Based on theevaluation, a report of the solder joint quality is presented to theuser.

[0149] The laminographic apparatus, as shown in FIG. 3a, comprises anX-ray tube 200 which is positioned adjacent printed circuit board 210.The circuit board 210 is supported by a fixture 220. The fixture 220 isattached to a positioning table 230 which is capable of moving thefixture 220 and board 210 along three mutually perpendicular axes, X, Yand Z. A rotating X-ray detector 240 comprising a fluorescent screen250, a first mirror 252, a second mirror 254 and a turntable 256 ispositioned adjacent the circuit board 210 on the side opposite the X-raytube 200. A camera 258 is positioned opposite mirror 252 for viewingimages reflected into the mirrors 252, 254 from fluorescent screen 250.A feedback system 260 has an input connection 262 from a sensor 263which detects the angular position of the turntable 256 and an outputconnection 264 to X and Y deflection coils 281 on X-ray tube 200. Aposition encoder 265 is attached to turntable 256. The position sensor263 is mounted adjacent encoder 265 in a fixed position relative to theaxis of rotation 40. The camera 258 is connected to a computer 270 viaan input line 276. The computer 270 includes the capability to performhigh speed image analysis. An output line 278 from the computer 270connects the computer to positioning table 230. A laser range finder 296is positioned adjacent the circuit board 210 for creating a Z-map of thesurface of the circuit board 210.

[0150] A perspective view of the laminographic apparatus is shown inFIG. 3c. In addition to the X-ray tube 200, circuit board 210,fluorescent screen 250, turntable 256, camera 258, positioning table 230and computer 270 shown in FIG. 3a, a granite support table 290, aload/unload port 292 and an operator station 294 are shown. The granitetable 290 provides a rigid, vibration free platform for structurallyintegrating the major functional elements of the laminographicapparatus, including but not limited to the X-ray tube 200, positioningtable 230 and turntable 256. The load/unload port 292 provides a meansfor inserting and removing circuit boards 210 from the machine. Theoperator station 294 provides an input/output capability for controllingthe functions of the laminographic apparatus as well as forcommunication of inspection data to an operator.

[0151] In operation of the laminographic apparatus as shown in FIGS. 3aand 3 c, high resolution, cross-sectional X-ray images of the solderjoints 214 connecting components 212 on circuit board 210 are acquiredusing the X-ray laminographic method previously described in referenceto FIGS. 1 and 2. Specifically, X-ray tube 200, as shown in FIG. 3a,comprises a rotating electron beam spot 285 which produces a rotatingsource 280 of X-rays 282. The X-ray beam 282 illuminates a region 283 ofcircuit board 210 including the solder joints 214 located within region283. X-rays 284 which penetrate the solder joints 214, components 212and board 210 are intercepted by the rotating fluorescent screen 250.

[0152] Dynamic alignment of the position of the X-ray source 280 withthe position of rotating X-ray detector 240 is precisely controlled byfeedback system 260. The feedback system correlates the position of therotating turntable 256 with calibrated X and Y deflection values storedin a look-up table (LUT). Drive signals proportional to the calibrated Xand Y deflection values are transmitted to the steering coils 281 on theX-ray tube 200. In response to these drive signals, steering coils 281deflect electron beam 285 to locations on an annular shaped target anode287 such that the position of the X-ray source spot 280 rotates insynchronization with the rotation of detector 240 in the mannerpreviously discussed in connection with FIG. 1.

[0153] X-rays 284 which penetrate the board 210 and strike fluorescentscreen 250 are converted to visible light 286, thus creating a visibleimage of a single plane within the region 283 of the circuit board 210.The visible light 286 is reflected by mirrors 252 and 254 into camera258. Camera 258 typically comprises a low light level closed circuit TV(CCTV) camera which transmits electronic video signals corresponding tothe X-ray and visible images to the computer 270 via line 276. The imageanalysis feature of computer 270 analyzes and interprets the image todetermine the quality of the solder joints 214.

[0154] Computer 270 also controls the movement of positioning table 230and thus circuit board 210 so that different regions of circuit board210 may be automatically positioned within inspection region 283.

[0155] The laminographic geometry and apparatus shown and described withreference to FIGS. 1-3 are typical of that which may be used inconjunction with the present invention. However, specific details ofthese systems are not critical to the practice of the present invention,which addresses the accurate positioning of the circuit board 210 alongthe Z-axis 40 of the system. For example, the number of computers anddelegation of tasks to specific computers may vary considerably fromsystem to system as may the specific details of the X-ray source,detector, circuit board positioning mechanism, etc. One skilled in theart will also recognize that other techniques, for example computedtomography, may be used to produce cross sectional images of specificplanes within a solder joint. Furthermore, specific details of varioustechniques and equipment for creating a Z-map of the surface of thecircuit board may be utilized. The present invention is applicable toany type of system which generates cross sectional images of specificplanes within a test object and requires accurate determination ofZ-axis location within the test object.

LASER SURFACE MAPPING

[0156] Shown in FIGS. 4a, 4 b and 4 c are printed circuit boards 310with a plurality of laser surface map points 300 used to create Z-mapsof the surface of the circuit boards 310. Referring to FIG. 4a, thelaser surface map points 300 a, 300 b, 300 c, etc. are interconnected toform a series of individual surface map triangles 304 a, 304 b, etc.which together form a triangular mesh 318 which represents a “backbone”for the board 310. For clarity of illustrating the surface map triangles304 and the triangular mesh 318, the circuit board 310 shown in FIG. 4ashows only 2 solder pads 320 a and 320 b located within a board view 730a. Board view 730 a has a center location 302. Other electricalcomponents which would typically be mounted to the board 310 are notshown. FIGS. 4b and 4 c illustrate laser map triangular meshes 318superimposed on circuit boards 310 a and 310 b which have a variety ofelectronic components 312 attached to the circuit board 310 by solderconnections 314.

[0157] In operation, the laser range finder 296 determines a Z-axisdistance for each of the laser surface map points 300 on the surface ofthe board 310. The locations of the laser surface map points 300 on thesurface of the circuit board 310 are predetermined by the specificdesign and layout of components 312 on the board 310 and the inspectioncriteria for specific regions of the board 310. It is preferred that thelaser map points 300 be located near the solder joints 314 beinginspected. Additionally, the size of the each triangle 304 forming themesh is determined by the availability of laser map points 300 which donot interfere with components 312 mounted to board 310 and the desiredaccuracy of the Z-map for specific regions of the board 310. Forexample, specific regions of the board 310 may have characteristicswhich require a smaller triangle 304 to accurately reflect the Zelevation of the solder joints 314 located within that region 304.

[0158] Typically, this Z-map of the surface of the circuit board 310,represented by the triangular mesh 318, does not coincide with thesurface of the circuit board 310. In fact, a common problem is that thetriangular interpolation is not very accurate and does not match theboard surface. This is illustrated in FIG. 5, which shows an enlargedcross sectional view of section A-A of the circuit board 310 shown inFIG. 4a. A Z-axis reference plane 316 corresponding to the board viewcenter 302 of board view 730 a is also shown. In this example, theZ-axis reference plane 316 for board view center 302 is determined byreference to surface map triangle 304 c (FIG. 4a). One option selects aZ-axis elevation for Z-axis reference plane 316 which corresponds to theZ-axis elevation of the surface map triangle 304 c at the XY coordinateswhich define the board view center 302. In this example, the Z-axisreference plane 316 for board view 730 a is a plane which is parallel tothe XY plane and is constant for each location of board view 730 a. Alsoshown in FIG. 5 are solder pads 320 on both surfaces 324 a and 324 b ofthe circuit board 310. As seen in this exaggerated view, the surfaces324 a and 324 b of the circuit board 310 may not be flat and may noteven be parallel to the Z-axis reference plane 316. The presentinvention addresses this problem by automatically measuring and storingthe distance, referred to as “Delta Z”, between each solder pad 320 andthe Z-axis reference plane 316. For example, in FIG. 5, ÄZ₁ and ÄZ₂represent the Delta Z values for solder pads 320 a and 320 b located onsurface 324 a of the circuit board 310. For solder pads on the oppositeside of the board from the laser measured surface, Delta Z values aredetermined by storing the distance between the solder pad and anotherZ-axis reference plane 317 calculated by adding a nominal boardthickness, t_(NOM), to the top reference plane 316. Also, the sign ofthe Delta Z value opposite the laser measured surface side is invertedto maintain a consistent sign convention. Thus, positive Delta Z valuesimply the pad lies outside of the two defined reference planes, whilenegative Delta Z values imply the pad lies within the reference planes.So similarly, ÄZ₃, represents the Delta Z value for solder pad 320 clocated on surface 324 b of the circuit board 310. In the aboveexamples, ÄZ₁ and ÄZ₂ have positive values because the pads lie outsidethe reference surfaces, while ÄZ₃ has a negative value because the padlies inside the reference surfaces. While not shown, it should be notedthat in cases of extreme board warpage, the Delta Z values for a solderpad located on surface 324 a may have both positive and negative values.In other words, the Z-axis reference plane 316 may be located above theboard surface 324 a in some areas and below the board surface 324 a inother areas. There are numerous other options for selecting Z-axisreference elevations for a board view or for individual locations withina board view. Several alternatives for determining a Z-axis reference(s)for a board view with respect to the triangular mesh 318 include: 1) theaverage Z-axis elevation of the surface map triangle 304 within which amajor portion of a board view 730 is located; 2) an interpolated Z-axiselevation of the surface map triangle 304 corresponding to the XYcoordinates which define the center (or other selected location) of aboard view 730; 3) a plurality of interpolated Z-axis elevations of thesurface map triangle 304 corresponding to the XY coordinates whichdefine specific solder pads 320 located within of a board view 730; etc.

[0159] Alternatively, a Z-map of the surface of the circuit board may becreated by measuring the Z-axis coordinates of a selected subset of thesolder joints/solder pads on the circuit board using X-ray images. Inthis manner, the laser range finder is eliminated and the laser surfacemap points are replaced by “solder joint/solder pad surface map points”.

DETERMINATION OF DELTA Z(ÄZ) VALUES

[0160] A delta Z value for each solder pad 320 on the circuit board 310is determined in the following manner. Referring to FIG. 6, which showsan enlargement of the solder pad 320 a in FIG. 5, a series oflaminographic cross sectional images of the solder pad 320 a areacquired. For example, as shown in FIG. 6, five cross sectional images,corresponding to image planes 340A, 340B, 340C, 340D and 340E, areobtained at five different ÄZ values which bracket the Z-axis locationof solder pad 320 a. In this example, the Delta Z value for image plane340A is the distance between the image plane 340A and the Z-axisreference plane 316 and is designated as ÄZ_(A). Similarly, thedistances between the image planes 340B, 340C, 340D and 340E and theZ-axis reference plane 316 are designated as ÄZ_(B), ÄZ_(C), ÄZ_(D) andÄZ_(E), respectively. The image plane which most accurately reflects thedistance between the solder pad 320 a and the Z-axis reference plane 316is image plane 340C. Thus, for the example shown in FIG. 6, the Delta Zfor solder pad 320 a is ÄZ_(C).

[0161] The apparatus and method of the present invention determines thatÄZ_(C) is the most accurate value of Delta Z for solder pad 320 a byanalyzing the five cross sectional images of the solder pad 320 aobtained at image planes 340A, 340B, 340C, 340D and 340E. Generally, theimage which exhibits the best focus is formed at the image plane whichmost accurately corresponds to the location of the solder pad 320 a. Theimage exhibiting the best focus of the solder pad 320 a may bedetermined by a number of different focus quality parameters. Forexample, the image which displays the sharpest edges, i.e., the highestvariance of the gradients of the image, may be selected as the imageexhibiting the best focus. In the example shown in FIG. 6, when thevariance of the gradients of the five images formed at the image planes340A, 340B, 340C, 340D and 340E are computed and compared, the crosssectional image of the solder pad 320 a formed at image plane 340Cexhibits the highest variance of the gradient. While the example shownin FIG. 6 shows five image planes, it is to be understood that adifferent number of image planes, either less than or greater than five,may be selected in practicing the present invention. Additionally,interpolation between the focus quality parameter, e.g., sharpness, ofthe images corresponding to the image planes 340A, 340B, 340C, 340D and340E may be used to determine an interpolated Delta Z for the solder pad320 a.

[0162] One standard way to approximate the gradient of an image is knownas Robert's gradient which is given by the following relation:

G _(R) [f(x,y)]≅/f(x,y)−f(x+1,y+1)/+/f(x+1,y)−f(x,y+1)/

[0163] where f(x,y) represents the gray value of the pixel located atx,y in an I×J pixel size image. The procedure for determining Robert'sgradient, G_(R), is illustrated is FIG. 7a. A generalization of thisprocedure is actually preferred for the present invention. Instead ofapproximating the gradient over a 2×2 pixel grid, a modified Robert'sgradient (G_(MR)) is approximated over an adjustable kernal size K whichis greater than or equal to 2. The modified Robert's gradient (G_(MR))is approximated in a K×K pixel grid by the following relation:

G _(MR) [f(x,y)]≅/f(x−N,y−N)−f(x+M,y+M)/+/f(x+M,y−N)−f(x−N,y+M)/

[0164] where K is an integer which is greater than or equal to 2;N=(K−1)/2 rounded down to the nearest integer; and M=K−N−1. For example,for K=2, N=0 and M=1, for K=3, N=1 and M=1, for K=4, N=1 and M=2, forK=5, N=2 and M=2, etc. This procedure for determining the modifiedRobert's gradient, G_(MR), is illustrated in FIG. 7b. The edge frequencymay be tuned by adjusting the kernal size K. Robert's gradient and othertechniques for analyzing digital images are described in a book authoredby Rafael C. Gonzalez and Paul Wintz entitled “Digital ImageProcessing”, Addison Wesley Publishing Company, Inc., 1987, the entirecontents of which are hereby incorporated herein by reference.

[0165] After determining the gradient for multiple pixels comprising theimage for each of the cross sectional images of the solder pad 320 aobtained at image planes 340A, 340B, 340C, 340D and 340E, the varianceof the gradients for each image, V_(A)(G), V_(B)(G) V_(C)(G), V_(D)(G)and V_(E)(G) is calculated using standard techniques for calculatingvariances. The variances are then compared to determine which image hasthe largest/maximum value of the variance of the gradients, V(G). In theexample shown in FIG. 6, the variance of the gradients V_(C)(G) for thecross sectional image of the solder pad 320 a obtained at image plane340C is the maximum. Thus, since ÄZ_(C) is the Delta Z value at whichimage plane 340C is located, ÄZ_(C) is assigned as the Delta Z value forsolder pad 320 a. In this idealized example, the variance of thegradients V_(C)(G) is the maximum and is symmetrical with itsneighboring image planes 340B and 340D. However, it is more likely thatthis will not be the case. Therefore, interpolation between thevariances of the gradients V_(A)(G), V_(B)(G), V_(C)(G), V_(D)(G) andV_(E)(G), for neighboring image planes may be used to determine thelargest/maximum value of the variance of the gradients, V(G). Delta Zfor the solder pad 320 a is then set equal to an interpolated ÄZcorresponding to the interpolated largest/maximum value of the varianceof the gradients, V(G).

[0166] A generalized outline of the above procedure for determining aDelta Z value for each solder pad 320 on the circuit board 310 is shownin the flowchart 400 of FIG. 8. Activity blocks 404, 408, 412, 416, 420and 424 form an iterative loop for: A) acquiring a plurality K of crosssectional images of the solder pad 320 at a plurality K of Delta Zvalues where each of the Delta Z values for the image planes, i.e., thedistances between the image planes and the Z-axis reference plane 316,has a different value (activity block 412); B) calculating and storingthe Gradient, G[f(x,y)], for multiple pixels comprising each of the Kimages (activity block 416); and C) calculating the Variance of theGradients, V_(I)(G), for each of the K images (activity block 420).Preferably, the range of Delta Z values is selected to bracket thedesign and/or empirically determined approximate Delta Z value, i.e.,Z-axis location, of the solder pad 320. In activity block 428, theVariances of the Gradients, V_(I)(G), for the K images are analyzed andinterpolation is used to determine a largest/maximum value, V_(MAX)(G),of the Variances of the Gradients, V_(I)(G). In activity block 432,Delta Z for solder pad 320 is set equal to the interpolated value ofDelta Z corresponding to the largest/maximum value, V_(MAX)(G), of theVariances of the Gradients, V_(I)(G).

[0167] While the above description determines, via cross sectionalimages of the solder pad 320 a, the actual Z-axis location of the solderpad 320 a by analyzing the focus, i.e., sharpness, of the images, oneskilled in the art will recognize that alternative methods may be usedto determine, also via cross sectional images of a solder pad 320/solderjoint 314, the actual Z-axis location of the solder pad 320/solder joint314. Numerous other parameters including other image quality parameters,geometrical parameters, etc. may be used to determine the actual Z-axislocations of the solder pad 320/solder joint 314. Furthermore, it may beadvantageous to perform additional image processing techniques on theimages, including but not limited to smoothing, blurring, etc., duringthe analysis of the images. These images processing and analysis methodsare to be understood as being included within the scope of the presentinvention.

[0168] In the example shown in FIG. 6, image plane 340C is shown asintercepting the midpoint of the solder pad 320 a and will thus exhibitthe maximum value of the variance of the gradients of the multipleimages formed at image planes 340A, 340B, 340C, 340D and 340E. However,in practice, it is unlikely that such an idealized situation willprevail. One alternative is that one or more of the image planes mayintercept the solder pad, however, not at the midpoint of the solderpad, while the remaining image planes may fall above and below thesolder pad. Another alternative is that none of the image planes mayintercept the solder pad but may be distributed above and below thesolder pad. Yet another alternative is that all of the image planes maybe distributed above the solder pad or all of the image planes may bedistributed below the solder pad. Thus, it is often advantageous toanalyze and/or interpolate the variances of the gradients of themultiple images to determine the best value of ÄZ for a particularfamily of cross sectional images.

[0169] One such analysis technique is illustrated in FIG. 9, which showsa plot 500 of the variances of the gradients, 504A, 504B, 504C, 504D and504E, of multiple cross sectional images as a function of the Z-axislocations, ÄZ_(A), ÄZ_(B), ÄZ_(C), ÄZ_(D) and ÄZ_(E), of the image planecorresponding to each image. In this example, a parabolic curve 508 isfit to three or more of the variances of the gradients, 504A, 504B,504C, 504D and 504E. The ÄZ coordinate corresponding to the peak 512 ofthe parabolic curve 508, ÄZ_(P), is selected as the best value of ÄZ forthe family of cross sectional images corresponding to the variances ofthe gradients, 504A, 504B, 504C, 504D and 504E. Other techniques fordetermining the best value of ÄZ for a particular family of crosssectional images will be obvious to one of ordinary skill in the art andare to be understood to be included within the scope of the presentinvention. For example, the variances of the gradients 504A, 504B, 504C,504D and 504E, may be fit to a different curve other than a parabola,e.g. a hyperbola, a Gaussian, etc.

SPECIAL CASES

[0170] Ball Grid Arrays (BGA)

[0171] The above described technique may require modifications asapplied to specific types of electronic devices and solder joints. Forexample, a device, as shown in FIG. 10, commonly referred to as a BGAdevice, has solder connections which may be analyzed using amodification of the above described technique for determining Delta Zvalues. In a BGA device, the contact pads are formed in a grid on theunderside of the device. A corresponding grid of contact pads isprovided on the surface of the circuit board. Balls of solder are formedon the circuit board contact pads. As the contact pad grid on theunderside of the BGA device is aligned with the contact pad grid on thesurface of the circuit board, and the BGA device is mounted to thecircuit board surface, the solder balls provide an electrical connectionbetween the contact pads on the circuit board, and the contact pads onthe BGA device. Thus, the solder connections are sandwiched between thebottom surface of the BGA device and the circuit board. These solderconnections are referred to as a Ball Grid Assay (BGA).

[0172]FIG. 10 depicts a BGA device 612 having contact pads 616 on itsunderside. The BGA device 612 is mounted onto a circuit board 610 havingcontact pads 620. Also depicted in FIG. 10 are solder balls 614 whichprovide electrical connections between the contact pads 616 and thecontact pads 620 so that a solder joint is formed between each pair ofcontact pads. Note that most of the solder joints to be inspected arehidden so that they cannot be inspected either visually or by usingconventional X-ray inspection. By employing the laminography processdescribed herein however, a cross-sectional view at or near the surfaceof the circuit board 610 can be taken which allows the solderconnections of a BGA device to be analyzed.

[0173]FIG. 11 is an enlarged cross-sectional side view of solderconnection 614 between solder pad 616 on BGA device 612 and solder pad620 on circuit board 610 illustrating typical characteristics of the BGAsolder connection 614. As was previously discussed (see FIG. 6), aseries of laminographic cross sectional images of the solder pad 620 areacquired. For example, as shown in FIG. 11, five cross sectional images,corresponding to image planes 640A, 640B, 640C, 640D and 640E, areobtained at five different ÄZ values which bracket the Z-axis locationof solder connection 614. As before, the Delta Z value for image plane640A is the distance between the image plane 640A and the Z-axisreference plane 316 and is designated as ÄZ_(A). Similarly, thedistances between the image planes 640B, 640C, 640D and 640E and theZ-axis reference plane 316 are designated as ÄZ_(B), ÄZ_(C), ÄZ_(D) andÄZ_(E), respectively. The image plane which most accurately reflects thedistance between the solder pad 620 and the Z-axis reference plane 316is image plane 640B. However, analysis of the images formed at imageplanes 640A, 640B, 640C, 640D and 640E as previously described, i.e.,determination of the maximum value of the variances of the gradients ofthe images formed at image planes 640A, 640B, 640C, 640D and 640E, doesNOT yield this result. The result of the previously described analysisis that image plane 640D, which corresponds approximately to themidpoint of the solder connection 614, is the image which exhibits themaximum value of the variances of the gradients of this series ofimages. This is due to the structure surrounding the BGA solderconnection, i.e., the BGA device structure 612 and the circuit boardstructure 610, in addition to the solder connection 614. However, sincethe average thickness of the solder connection 614 is generally known,or can be readily determined, the distance from the midpoint of thesolder connection 614 to solder pad 620 can be subtracted from the DeltaZ value (ÄZ_(D)) for image plane 640D, to determine the correct Delta Zvalue for solder pad 620.

[0174] As before, the apparatus and method of the present inventiondetermines that ÄZ_(D) is the most accurate value of Delta Z for themidpoint of solder connection 614 by analyzing the five cross sectionalimages obtained at image planes 640A, 640B, 640C, 640D and 640E. Theimage which has the sharpest edges, i.e., the highest variance of thegradients of the image, is formed at the image plane which mostaccurately corresponds to the location of the midpoint of solderconnection 614. In the example shown in FIG. 11, when the variance ofthe gradients of the five images formed at the image planes 640A, 640B,640C, 640D and 640E are computed and compared, the cross sectional imageformed at image plane 640D exhibits the highest variance of thegradient. While the example shown in FIG. 11 shows five image planes, itis to be understood that a different number of image planes, either lessthan or greater than five, may be selected in practicing the presentinvention.

[0175] There is another way to identify the midpoint of solderconnection 614 from the images formed at image planes 640A, 640B, 640C,640D and 640E. This is achieved by analyzing the dimensions of theportion of each image which corresponds to the solder connection 614.The image which exhibits the maximum diameter of the portioncorresponding to solder connection 614 identifies the midpoint of thesolder connection 614. This technique may be used in addition to or asan alternative to the analysis which determines the midpoint of solderconnection 614 by determining which image exhibits the highest varianceof the gradients, i.e., is the sharpest. As before, interpolationprocesses such as those previously discussed with reference to FIG. 9,may be used to determine a Delta Z value, via the midpoint value, whichfalls between the discrete image planes 640A, 640B, 640C, 640D and 640E.

CIRCUIT BOARD INSPECTION

[0176] The above described techniques are used to inspect circuit boardsin the following manner. Typically, the image area, i.e., board view, oflaminography systems or other imaging systems which acquire the crosssectional images of connections on the circuit board is much smallerthan the circuit board being inspected. Thus, multiple images of thecircuit board are required to accomplish a complete inspection of thecircuit board. FIG. 12 shows a circuit board 710 having multiplecomponents 712 mounted thereon via connections 714. Several board views730 are illustrated. For example, board view 730 a includes components712 a and 712 b and corresponding connections 714 a, 714 b, 714 c and714 d. Board view 730 b includes component 712 c and its correspondingconnections 714. Board view 730 c includes components 712 d, 712 e, 712f, 712 g and 712 h and their corresponding connections 714. Prior to thepresent invention, an operator manually determined a Delta Z value foreach laser surface map point 300 (see FIGS. 4a, 4 b and 4 c). Thepresent invention eliminates this error prone and time consumingprocess.

[0177] Using the above described processes, a Delta A value for EACHsolder connection 714 on the circuit board 710 is automaticallydetermined and stored. Using these stored Delta Z values for each solderconnection 714, a Delta Z value for each board view is then calculated.For example, a simple average all of the Delta Z's for each pin in theboard view may be appropriate. However, more sophisticated methods maybe appropriate for some situations. For example, it may be determinedthat a particular board view could be better inspected with more thanone value of Delta Z, i.e., multiple cross sectional image slices. Thismight occur if board warpage, board thickness, etc. caused the solderpads within a board view to be located at different Z-axis elevations.

[0178] In use, after a pattern of board views for a particular circuitboard have been determined, it is a straightforward matter to calculatethe Delta Z for each board view using the stored data file of Delta Zvalues for each individual connection on the circuit board. For example,the Delta Z value for board view 730 a on circuit board 710 shows inFIG. 12, is obtained by recalling the Delta Z values for connections 714a, 714 b, 714 c and 714 d and determining their average. Similarly, theDelta Z value for board view 730 d is obtained by recalling the Delta Zvalues for all of the connections 714 included on components 712 d, 712e, 712 f, 712 g and 712 h and determining their average. In somesituations, it may be determined that not all of the connection 714Delta Z values need to be included in the average for that particularboard view.

[0179] One advantage of this approach for determining Delta Z values fora board view is apparent when the board view changes. Previously, achange of board views required reinterpolation of the triangular mesh318. Using the present invention, the Delta Z for the newly definedboard view is readily determined by simply recalling the Delta Z valuesfor the connections 714 included with the newly defined board view andthen determining their average.

[0180] Summary, Ramifications and Scope

[0181] Accordingly, the reader will see that the present inventionsolves many of the specific problems encountered when inspecting solderconnections on circuited boards. Particularly important is that it bothremoves the tedious and error prone method of manually setting laserDelta Z values, while supplying correct view Delta Z values in caseswhere board warpage is consistent within the surface map triangles.

[0182] Furthermore, the present invention has the additional advantagesin that

[0183] it is very easy to use and does not require any majormodifications to the inspection equipment;

[0184] it is automatic thereby removing the subjectiveness associatedwith manual techniques;

[0185] it improves the accuracy of Z elevation determination;

[0186] it has the ability to handle board thickness variations;

[0187] it has the ability to improve throughput since the number of mappoints may be reduced for some applications;

[0188] it has the ability to model board warpage more accurately; and

[0189] it is compatible with the currently used manual technique and maythus be used on an as needed basis.

[0190] Although the description above contains many specificities, theseshould not be construed as limiting the scope of the invention but asmerely providing illustrations of some of the presently preferredembodiments of this invention. For example, alternative techniques andimage parameters may be used to determine which image corresponds to theproper Z-axis location; alternative interpolation techniques may beused; alternative techniques may be used to acquire the cross sectionalimages; alternative laser mapping or fiducial mapping techniques may beemployed; alternative methods for determining a board view Delta Z fromthe individual connection Delta Z values may be used; alternativemethods for determining the Delta Z values for particular connectionsmay be used; etc.

[0191] Thus, the scope of the invention should be determined by theappended claims and their legal equivalents, rather than by theforegoing description and examples given. All changes which come withinthe meaning and range of equivalency of the claims are to be embracedwithin their scope.

I claim:
 1. A device for inspecting electrical connections on a circuitboard comprising: a source of X-rays which emits X-rays through theelectrical connection from a plurality of positions; an X-ray detectorsystem positioned to receive the X-rays produced by said source ofX-rays which have penetrated the electrical connection, said X-raydetector system further comprising an output which emits data signalscorresponding to an X-ray image of the electrical connection produced bythe X-rays received and detected by said X-ray detector afterpenetrating the electrical connection; an image memory which combinessaid detector data signals to form an image database which containsinformation sufficient to form a cross-sectional image of a cuttingplane of said electrical connection at an image plane; and a processorwhich controls the acquisition of said cross-sectional image andanalyzes said cross-sectional image, said image processor furthercomprising: a Z-axis controller for varying a Delta Z value, i.e., theZ-axis distance between the image plane and a reference Z-axis position,and acquiring a plurality of Delta Z images of the electrical connectionat a plurality of said Delta Z values; an image gradient section whichcalculates and stores a plurality of gradients for each of saidplurality of Delta Z images; a variance calculator section whichdetermines a variance of said plurality of gradients for each of saidplurality of Delta Z images; and a comparator which compares saidvariances of said gradients for each of said plurality of Delta Zimages.
 2. A device as defined in claim 1 further comprising a surfacemapper for creating a surface map of the circuit board.
 3. A device asdefined in claim 2 wherein said surface mapper further comprises a laserrange finder for determining reference Z-axis values for a plurality ofpoints on the circuit board thereby creating a laser surface map of thecircuit board.
 4. A device as defined in claim 1 wherein said imagegradient is approximated over a K×K pixel grid by the followingrelation: G _(MR)[f(x,y)]≅/f(x−N,y−N)−f(x+M,y+M)/+/f(x+M,y−N)−f(x−N,y+M)/ where f(x,y)represents a gray value of a pixel located at x,y; K is an integer whichis greater than or equal to 2; N=(K−1)/2 rounded down to the nearestinteger; and M=K−N−1.
 5. A device as defined in claim 1 wherein saidcomparator further comprises means for fitting said variances of saidplurality of gradients for each of said plurality of Delta Z images witheither one of a parabolic curve or a Gaussian curve.
 6. A device asdefined in claim 5 wherein said comparator further comprises means fordetermining a Delta Z value corresponding to a maximum value of saidparabolic curve or said Gaussian curve.
 7. A device as defined in claim1 wherein said source of X-rays comprises a plurality of X-ray sources.8. A device as defined in claim 1 wherein said X-ray detector systemcomprises a plurality of X-ray detectors.
 9. A device as defined inclaim 1 wherein said processor further comprises an image section whichproduces said cross-sectional image of a cutting plane of saidelectrical connection from said image database.
 10. A method ofdetermining the Z-axis position of an electrical connection on a circuitboard comprising the steps of: determining a reference Z-axis position,Z_(RF); acquiring a first cross sectional image of the electricalconnection at a first Z-axis position, Z_(RF)+ÄZ₁, and a second crosssectional image of the electrical connection at a second Z-axis positionZ_(RF)+ÄZ₂; determining a first plurality of gradients for the firstcross sectional image and a second plurality of gradients for the secondcross sectional image; calculating a first variance for the firstplurality of gradients corresponding to the first cross sectional imageat the first Z-axis position, Z_(RF)+ÄZ₁, and a second variance for thesecond plurality of gradients corresponding to the second crosssectional image at the second Z-axis position, Z_(RF)+ÄZ₂; and analyzingthe first and second variances and deriving therefrom the Z-axisposition of the electrical connection.
 11. A method as defined in claim10 wherein the reference Z-axis position is determined with a rangefinder.
 12. A method as defined in claim 11 wherein the range finderfurther comprises a laser range finder.
 13. A method of determining theZ-axis position of an electrical connection on a circuit boardcomprising the steps of: determining a reference Z-axis position,Z_(RF); acquiring a first cross sectional image of the electricalconnection at a first Z-axis position, Z_(RF)+ÄZ₁, a second crosssectional image of the electrical connection at a second Z-axisposition, Z_(RF)+ÄZ₂, and a third cross sectional image of theelectrical connection at a third Z-axis position, Z_(RF)+ÄZ₃;determining a first plurality of gradients for the first cross sectionalimage, a second plurality of gradients for the second cross sectionalimage and a third plurality of gradients for the third cross sectionalimage; calculating a first variance for the first plurality of gradientscorresponding to the first cross sectional image at the first Z-axisposition, Z_(RF)+ÄZ₁, a second variance for the second plurality ofgradients corresponding to the second cross sectional image at thesecond Z-axis position, Z_(RF)+ÄZ₂, and third variance for the thirdplurality of gradients corresponding to the third cross sectional imageat the third Z-axis position, Z_(RF)+ÄZ₃; and determining a maximumvariance value derived from the first, second and third variances andselecting a corresponding Z-axis position, Z_(RF)+ÄZ_(MAX),corresponding to the maximum variance value, as the Z-axis position ofthe electrical connection.
 14. A method as defined in claim 13 furthercomprising the step of determining a mathematical function whichincludes points which approximate the values of the first, second andthird variances.
 15. A method as defined in claim 14 wherein themathematical function is a parabola.
 16. A method as defined in claim 14wherein the mathematical function is a Gaussian.
 17. A method as definedin claim 13 further comprising a surface mapper for creating a surfacemap of the circuit board.
 18. A device for inspecting electricalconnections on a circuit board comprising: means for determining areference Z-axis position, Z_(RF); means for acquiring a first crosssectional image of the electrical connection at a first Z-axis position,Z_(RF)+ÄZ₁, a second cross sectional image of the electrical connectionat a second Z-axis position, Z_(RF)+ÄZ₂, and a third cross sectionalimage of the electrical connection at a third Z-axis position,Z_(RF)+ÄZ₃; means for determining a first plurality of gradients for thefirst cross sectional image, a second plurality of gradients for thesecond cross sectional image and a third plurality of gradients for thethird cross sectional image; means for calculating a first variance forthe first plurality of gradients corresponding to the first crosssectional image at the first Z-axis position, Z_(RF)+ÄZ₁, a secondvariance for the second plurality of gradients corresponding to thesecond cross sectional image at the second Z-axis position, Z_(RF)+ÄZ₂,and third variance for the third plurality of gradients corresponding tothe third cross sectional image at the third Z-axis position,Z_(RF)+ÄZ₃; and means for determining a maximum variance value derivedfrom the first, second and third variances and selecting a correspondingZ-axis position, Z_(RF)+ÄZ_(MAX), corresponding to the maximum value, asthe Z-axis position of the electrical connection.
 19. A device asdefined in claim 18 further comprising means for determining amathematical function which includes points which approximate the valuesof the first, second and third variances.
 20. A device as defined inclaim 19 wherein the Z-axis position, Z_(RF)+ÄZ_(MAX), corresponding tothe maximum variance value equals a Z-axis position which corresponds toa maximum value of the mathematical function.
 21. A device as defined inclaim 19 wherein the mathematical function is one of a parabola or aGaussian.
 22. A device as defined in claim 18 wherein the means fordetermining the reference Z-axis position further comprises a laserrange finder.
 23. A method for inspecting electrical connections on acircuit board comprising the steps of: determining a Z-axis position forsubstantially all of the electrical connections on the circuit board;storing the Z-axis positions for substantially all of the electricalconnections on the circuit board in a data base; selecting a first boardview which includes a first portion of the circuit board; and derivingfrom the stored values of the Z-axis positions for the electricalconnections included within the first board view, a Z-axis position forthe first board view.
 24. A method as defined in claim 23 furthercomprising the step of creating a surface map of the circuit board witha range finder.
 25. A method as defined in claim 23 further comprisingthe steps of: selecting a second board view which includes a secondportion of the circuit board; and deriving from the stored values of theZ-axis positions for the electrical connections included within thesecond board view, a Z-axis position for the second board view.
 26. Amethod for determining the Z-axis position of an electrical connectionon a circuit board comprising the steps of: acquiring two or more crosssectional images, at two or more Z-axis positions, of an area of thecircuit board which includes the electrical connection; and comparingand analyzing said two or more cross sectional images at said two ormore Z-axis positions, and deriving therefrom the Z-axis position of theelectrical connection.
 27. A method as defined in claim 26 furthercomprising the step of determining a reference Z-axis position, Z_(RF).28. A method as defined in claim 27 further comprising the steps of:acquiring a first cross sectional image of the electrical connection ata first Z-axis position, Z_(RF)+ÄZ₁, and a second cross sectional imageof the electrical connection at a second Z-axis position, Z_(RF)+ÄZ₂;determining a first plurality of gradients for the first cross sectionalimage and a second plurality of gradients for the second cross sectionalimage; calculating a first variance for the first plurality of gradientscorresponding to the first cross sectional image at the first Z-axisposition, Z_(RF)+ÄZ₁, and a second variance for the second plurality ofgradients corresponding to the second cross sectional image at thesecond Z-axis position, Z_(RF)+ÄZ₂; and analyzing the first and secondvariances and deriving therefrom the Z-axis position of the electricalconnection.
 29. A method as defined in claim 28 wherein the imagegradients are approximated over a K×K pixel grid by the followingrelation: G _(MR)[f(x,y)]≅/f(x−N,y−N)−f(x+M,y+M)/+/f(x+M,y−N)−f(x−N,y+M)/ where f(x,y)represents a gray value of a pixel located at x,y; K is an integer whichis greater than or equal to 2; N=(K−1)/2 rounded down to the nearestinteger; and M=K−N−1.
 30. A method as defined in claim 27 wherein thereference Z-axis position is determined with a range finder.
 31. Amethod as defined in claim 30 wherein the range finder further comprisesa laser range finder.
 32. A method as defined in claim 26 furthercomprising the steps of: determining a Z-axis position for substantiallyall of the electrical connections on the circuit board; storing theZ-axis positions for substantially all of the electrical connections onthe circuit board in a data base; selecting a first board view whichincludes a first portion of the circuit board; and deriving from thestored values of the Z-axis positions for the electrical connectionsincluded within the first board view, a Z-axis position for the firstboard view.
 33. A device for inspecting electrical connections on acircuit board comprising: means for acquiring two or more crosssectional images, at two or more Z-axis positions, of an area of thecircuit board which includes the electrical connection; and means forcomparing and analyzing said two or more cross sectional images at saidtwo or more Z-axis positions, and deriving therefrom the Z-axis positionof the electrical connection.
 34. A device as defined in claim 33further comprising: means for determining a reference Z-axis position,Z_(RF); means for acquiring a first cross sectional image of theelectrical connection at a first Z-axis position, Z_(RF)+ÄZ₁, a secondcross sectional image of the electrical connection at a second Z-axisposition, Z_(RF)+ÄZ₂, and a third cross sectional image of theelectrical connection at a third Z-axis position, Z_(RF)+ÄZ₃; means fordetermining a first plurality of gradients for the first cross sectionalimage, a second plurality of gradients for the second cross sectionalimage and a third plurality of gradients for the third cross sectionalimage; means for calculating a first variance for the first plurality ofgradients corresponding to the first cross sectional image at the firstZ-axis position, Z_(RF)+ÄZ₁, a second variance for the second pluralityof gradients corresponding to the second cross sectional image at thesecond Z-axis position, Z_(RF)+ÄZ₂, and third variance for the thirdplurality of gradients corresponding to the third cross sectional imageat the third Z-axis position, Z_(RF)+ÄZ₃; and means for determining amaximum variance value derived from the first, second and thirdvariances and selecting a corresponding Z-axis position,Z_(RF)+ÄZ_(MAX), corresponding to the maximum variance value, as theZ-axis position of the electrical connection.
 35. A device as defined inclaim 33 further comprising a surface mapper for creating a surface mapof the circuit board.